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Figure 3
(a) Reconstructed phase images (top) and probe intensity images of the first mode in three mixed-state modes (bottom) of a 200 nm test chart at slit widths of 10 µm (H) × 30 µm (V) (left) and 30 µm (H) × 150 µm (V) (right). (b) Dependence of the phase retrieval transfer function of the reconstructed image of the 200 nm-thick test chart on slit width. (c) Line profiles along the colored lines in the reconstructed images of (a). The FWHM values, obtained by fitting with the error function, are also displayed. |
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