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Figure 4
(a) Reconstructed phase and magnified image of the 6 nm-thick Ta test chart. (b) Histogram of the phase distribution in (a), fit with a composite function consisting of two Gaussian functions. (c) FE-SEM image of silica particles with an approximate diameter of 30 nm. (d) Ptychographic phase and magnified images corresponding to the same field of view as in (c). (e) Cross-sectional profile of the red dotted line in (d). (f) Phase retrieval transfer function for the reconstructed images of the 6 nm-thick Ta test chart and silica particles.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 30| Part 5| September 2023| Pages 989-994
https://doi.org/10.1107/S1600577523004897
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