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Figure 4
Undersampling problem in laminography: (a) grids (ξ1, ξ2, ξ3) in the Fourier space defined in (6)[link] for φ = 0° (regular tomography) and for φ = 30° showing the missing cone in red; (b) synthetic integrated circuit dataset with the red-coloured position of the vertical slice for demonstrating reconstruction quality, (c) examples of vertical slice reconstruction in laminography for different tilt angles.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 4| July 2024|
https://doi.org/10.1107/S1600577524002923
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