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Figure 1
Photographs of the IBF system. (a) Exterior view of the vacuum chamber, with labelling of important components (SAM instrument, camera and ion source). (b) Side view inside the chamber during figuring, showing the KRi KDC100 ion source and neutralizer, the aperture plates and the motion stage, including a mounted Faraday cup which is used to align the ion beam relative to the motion system.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 4| July 2024| Pages 706-715
https://doi.org/10.1107/S1600577524004594
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