Figure 5
(a) Schematic representation of a fiducialization method (`Method 1') involving marking a cross on the sample surface using a diamond-tipped tool. The measured location of the mark in both the HDX and IBF is used to align between the two coordinate systems. (b) Schematic representation of a fiducialization method (`Method 2') involving etching a beam footprint on the sample at known IBF system coordinates. This is then compared with the measured centre of the beam footprint in the HDX (or SAM) coordinates to align the two coordinate systems. |