Figure 9
Calculated dwell time and residuals for IBF correction of a measured surface using a 10 mm, 5 mm and 1 mm beam. The initial surface is measured from the trapezoidal mirror in Section 5.2 (with a slope filter applied to remove spikes). The 10 mm beam is effective at minimizing the dwell time to around an hour, but the remaining residuals are comparatively large. The 5 mm beam gives improved residual errors, but with an increased dwell time. Finally, the 1 mm beam minimizes the residual errors, but requires a prohibitively long dwell time of almost 47 h. |