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Figure 12
Comparison of the measured height profile of a Si mirror: (a) before IBF correction and (b) after IBF correction, plotted with the same colour bar. After one iteration of IBF, the PV height error is reduced from 38.5 nm to 5.2 nm, and the r.m.s. height error is reduced from 8.0 nm to 0.76 nm.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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