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Figure 4
A summary of results from the literature of successively lower height errors obtained using IBF, from the late 1980s to the present day. Since the inception of the technique, advances in metrology techniques and the maturation of IBF technology have greatly improved the process, allowing the achieved r.m.s. errors to half approximately every five years. In recent years, the technology can reliably provide sub-nm height errors for 2D surfaces. See Appendix A[link] for a chronological list of references.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 4| July 2024| Pages 655-669
https://doi.org/10.1107/S1600577524002935
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