Figure 9
(a) Photograph of the Si mirror used for the temperature test. A temperature sensor was installed at the top of the mirror (labelled). (b) Graph of temperature over time when a raster path was etched on the sample with the ion beam, with a total etching time of 1 h and 5 min. The sample temperature increased dramatically during etching by over 80°C, followed by a rapid fall after etching completed. |