Figure 5
Retrieved wavefront error on the annular cross-section of the beam at x = 0, i.e. in the optical centre of the ellipsoid (Fig. 1), in units of λ0 at 277 eV. Five different CCD image pairs within 210 mm ≤ Δx ≤ 250 mm are analysed with the algorithm (Figs. 2 and 3). The averaged data are fitted by means of a Zernike expansion (Fig. 6) up to seventh-order aberrations, with an r.m.s. value = . See also the movie in the supporting information. |