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Figure 1
Standard deviation of the position of the reticle image under test relative to a reference image, evaluated by our CIRIL algorithm, as a function of the number of subpixels N. The standard deviation is presented in units of pixels (a) and subpixels (b), see text for details. Solid blue line: synthetic reticle images. Solid and dashed black lines: experimental data obtained by using an autocollimator aperture of 32 mm (moderate level of imaging noise) and 2.5 mm (high noise level), respectively.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 31| Part 4| July 2024| Pages 670-680
https://doi.org/10.1107/S1600577524003552
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