view article
Figure 3
Flexing of bipods accommodates differential expansion of the metrology frame relative to the baseplate. (Left) Resultant 3D finite element analysis distortion of metrology frame caused by a 1°C temperature differential. (Right) Metrology frame deformation along the central tangential line of the metrology frame shows a 6.5 nm sagitta change for a 1°C temperature differential. Circles represent ZPS sensor locations.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 32| Part 1| January 2025|
https://doi.org/10.1107/S1600577524011007
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS