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Figure 3
Flexing of bipods accommodates differential expansion of the metrology frame relative to the baseplate. (Left) Resultant 3D finite element analysis distortion of metrology frame caused by a 1°C temperature differential. (Right) Metrology frame deformation along the central tangential line of the metrology frame shows a 6.5 nm sagitta change for a 1°C temperature differential. Circles represent ZPS sensor locations.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 32| Part 1| January 2025| Pages 133-144
https://doi.org/10.1107/S1600577524011007
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