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Figure 6
(Left) ZPS interferometer measurements of the sagitta/sag of the bimorph mirror as a series of four cycles of five bidirectional steps, each with the smallest possible voltage increments (0.1 V), were applied in open-loop by the HV-ADAPTOS to all piezo actuators to bend the mirror. The four cycles are superimposed to show the extreme repeatability in achieving sagitta steps as small as 500 pm. (Right) Zoom of the sagitta change of the mirror immediately after the first voltage step of 0.1 V shows a `ringing' effect with a damped amplitude of ∼800–100 pm and a period of ∼1 s.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 32| Part 1| January 2025|
https://doi.org/10.1107/S1600577524011007
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