Figure 13
Wave-optics simulation at focal spots for (a)–(d) 1 nm and (e)–(h) 3 nm FEL beam passing through (a, e) perfect M1; (b, f) M1 with thermal deformation; (c, g) M1 after shape compensation; (d, h) intensity distributions. Piezoelectric compensation refines the micrometre-level focus to near-ideal. |