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Figure 12
Thermal deformation in standard deviation of height error on the center of the beam footprint over 2 × FWHM versus time, with different damping ratio of ζ = 0.0005, 0.005, 0.05 and 0.5. |
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Figure 12
Thermal deformation in standard deviation of height error on the center of the beam footprint over 2 × FWHM versus time, with different damping ratio of ζ = 0.0005, 0.005, 0.05 and 0.5. |