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Figure 4
(a) Microbeam focusing optics (a two-dimensional focusing mirror polished by EEM) for BL32XU and (b) beam profile of an edge scan of a 1 µm beam. |
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Figure 4
(a) Microbeam focusing optics (a two-dimensional focusing mirror polished by EEM) for BL32XU and (b) beam profile of an edge scan of a 1 µm beam. |