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![[Figure 10]](ye5068fig10mag.jpg)
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Figure 10
(a) Lateral slice through a 3D laminographic reconstruction (0.36 µm effective pixel size) of a resolution test pattern (model ANT HXRCAL 25 nm, Edmonton, Canada), measured by LAMINO-II at IMAGE with a 45° tilt angle and with filtered whitebeam (B = 1.8 T, 3 mm PG and 3 mm SiC filters, 3000 projections for a total measurement time of 10 minutes). The sample-to-detector distance of ∼40 mm in combination with sufficiently closed primary slits of the beamline leads to features typical for beam propagation in the edge-enhancement regime (Cloetens et al., 2001  ). (b)–(d) Grey value line profiles along the respective 1.5 µm, 1 µm, and 0.75 µm half pitch pattern. While from 1.5 µm to 1 µm the contrast decreases only slightly, it is strongly reduced for 0.75 µm, from which we estimate the achieved 3D spatial resolution to 1–2 µm. |
![[Figure 10]](ye5068fig10.jpg)
 | JOURNAL OF SYNCHROTRON RADIATION |
ISSN: 1600-5775
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