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Figure 5
AFM measurements in the central area of the grating before and after multilayer coating. The two profiles were recorded near the grating center and they are averaged over a line length of ∼0.2 µm. The measured profiles (blue dots) are compared with modeled profiles (red lines) computed with the parameters of Table 3[link].

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 33| Part 1| January 2026| Pages 63-72
https://doi.org/10.1107/S1600577525009968
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