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Figure 8
X-ray holographic microscopy (XHM) setup. (a) Schematic of the XHM optical setup with (b) a waveguide channel. (c) Background image and (d) Siemens star hologram recorded with an exposure time of 10 s using the XHM setup. (e) Reconstructed in-focus hologram. (fi,ii) Resolved half-pitch features. (g) Fourier ring correlation (FRC) analysis. Scale bars: (b) 100 nm, (c–f) 1 µm. |

journal menu![[Figure 8]](mo5317fig8.jpg)
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