Figure 2
(a) Scatter plot of detected photons around the sharp edge of the test chart made of Co thin film, as a function of photon energy and vertical position around = −0.014 mm. The right panel shows the corresponding line profile. (b) Line profiles measured at different Z positions. The solid lines are the fitted curves by an error function. indicates the center of the fitted error function and the line shape is plotted as a function of deviation from , = . was changed by moving the test pattern. (c) The estimated resolution as a function of position. The solid line shows the resolution determined by ray-tracing simulation (offset from the ideal Wolter mirror position δ = 0), while the dashed line shows the resolution considering the finite alignment error (δ = 0.06 mm). |