view article
Figure 13
Sketch of a Si chip (7.5 mm wide) supporting nine Si3N4 square membranes (150 µm wide, 200 nm thick, 530 µm pitch), containing eight Au FGs and one continuous Au layer (210 nm thick). The area of each FG is 60 µm × 60 µm, and their p and f values are indicated on the side.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 33| Part 3| May 2026| Pages 858-869
https://doi.org/10.1107/S160057752600322X
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS