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Figure 14
Diffraction from square FGs with f = 1, p = 200 nm, and a lateral size of 60 µm (top) or 10 µm (bottom). The intensity of diffraction orders n = 1 (left) and n = 3 (right) is shown on a logarithmic scale.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 33| Part 3| May 2026| Pages 858-869
https://doi.org/10.1107/S160057752600322X
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