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Figure 1
The metrology structure in the ptychography setup. (1) VFM. (2) HFM. (3) Bound-to-VFM plane mirrors. (4) Bound-to-HFM plane mirrors. (5) Rotation stage. (6) PI stage. (7) Cylinder retroflector. (8) Sample holder. (9) Invar metrology frame. (10) Chamber board. (11) Monocrystalline diamond window. (12) Sapphire window. (13) Three vertically oriented interferometers. (14) Primary focusing sensor head. (15) Secondary focusing sensor head. (16) HFM interferometer pair. (17) VFM interferometer pair. (18) Deflection plane mirror.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 33| Part 5| September 2026|
https://doi.org/10.1107/S160057752600634X
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