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Figure 12
The difference between interferometers and the PI stage values after a linear fit. Panels (a), (b) and (c) present the measurement results along the Z-, Y- and X-axes, respectively, as the PI stage moves through its Z-axis stroke. Similarly, panels (d), (e) and (f) show the results along the Z-, Y- and X-axes when the PI stage moves through its Y-axis stroke. Panels (g), (h) and (i) show the Z-, Y- and X-axes results when it moves through its X-axis stroke.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 33| Part 5| September 2026|
https://doi.org/10.1107/S160057752600634X
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