view article

Figure 15
(a) Scanning trajectory from interferometers and piezo's capacitive sensors integrated in the PI stage. (b) Difference between the interferometer values and the PI stage readout.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Follow J. Synchrotron Rad.
Sign up for e-alerts
Follow J. Synchrotron Rad. on Twitter
Follow us on facebook
Sign up for RSS feeds