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Figure 5
Sample drifts and LIM offsets of a stack scan with 40 energy points for a circular particle sample. The blue lines represent experimental data, while the red lines are linear fitting results. Sample drifts in (a) X and (b) Y directions. LIM offsets in (c) X and (d) Y directions. |

journal menu![[Figure 5]](tol5027fig5.jpg)
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