view article

Figure 7
3D model of the (a) 6D alignment stage, (b) HFM X stage, (c) HFM yaw stage, (d) VFM pitch and roll stages and (e) VFM Z and Y stages.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Follow J. Synchrotron Rad.
Sign up for e-alerts
Follow J. Synchrotron Rad. on Twitter
Follow us on facebook
Sign up for RSS feeds