Systematic investigation of the diffraction efficiency of sub-15 nm resolution soft X-ray zone plates via simulation and measurement

Mao, Q.; Jiao, Y.; Liu, L.; Zhu, J.; Jiang, L.; Zhang, X.; Wang, Z.

doi:10.1107/S160057752600860X

Figure 2
(a) RCWA-calculated first-order diffraction efficiency curve of the zone plate based on the local grating approximation model. (b) RCWA-calculated first-order diffraction efficiency of the zone plate under TE and TM polarizations.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 33| Part 6| November 2026|

https://doi.org/10.1107/S160057752600860X

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