Systematic investigation of the diffraction efficiency of sub-15 nm resolution soft X-ray zone plates via simulation and measurement

Mao, Q.; Jiao, Y.; Liu, L.; Zhu, J.; Jiang, L.; Zhang, X.; Wang, Z.

doi:10.1107/S160057752600860X

Figure 5
(a) Schematic of the optical layout for soft X-ray imaging and diffraction-efficiency measurements. The positive first-order (+1) diffracted beam passes through the OSA, whereas the zeroth-order direct beam, the divergent negative first-order (−1) diffracted beam, and the representative positive third-order (+3) diffracted beam are intercepted by the OSA. The optical paths are shown schematically and are not to scale. (b) Photograph of the actual experimental setup at SSRF beamline BL08U1A, with arrows indicating the positions of the FZP, OSA, and PMT detector.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 33| Part 6| November 2026|

https://doi.org/10.1107/S160057752600860X

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