Systematic investigation of the diffraction efficiency of sub-15 nm resolution soft X-ray zone plates via simulation and measurement

Mao, Q.; Jiao, Y.; Liu, L.; Zhu, J.; Jiang, L.; Zhang, X.; Wang, Z.

doi:10.1107/S160057752600860X

Figure 7
Diffraction efficiency measurements and theoretical benchmarking of the soft X-ray Fresnel zone plate. (a) Measured absolute diffraction efficiencies across the 525–952 eV photon energy range. (b) Measured relative diffraction efficiencies in the 525–952 eV range, excluding the absorption loss of the supporting membrane. (c) Overlay comparison of the measured relative diffraction efficiencies with the nominal RCWA predictions based on the designed geometry and tabulated optical constants. The values of 2.7%, 1.9%, and 2.1% discussed in the text denote the relative RMS fluctuations of the repeated absolute-efficiency measurements at 710, 870, and 952 eV, respectively. The y-axis values in all three panels are expressed as percentages.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 33| Part 6| November 2026|

https://doi.org/10.1107/S160057752600860X

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