Comprehensive characterization of TSV etching performance with phase-contrast X-ray microtomography

Li, K.; Deng, B.; Zhang, H.; Yu, F.; Xue, Y.; Xie, C.; Ye, T.; Xiao, T.

doi:10.1107/S1600577520005494

Journal of Synchrotron Radiation Journal of
Synchrotron Radiation

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Figure 1
Sample preparation and the experimental setup. (a) Procedures for sample preparation. (b) Schematic diagram for X-ray microtomography at BL13W1 of SSRF. (c) A microscopic view of the sample. (d) A photograph of the experimental setup.

JOURNAL OF
SYNCHROTRON
RADIATION

ISSN: 1600-5775

Volume 27| Part 4| July 2020| Pages 1023-1032

https://doi.org/10.1107/S1600577520005494

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