view article
Figure 5
Diagram of sidewall trapezoid analysis, where (a) two types of trapezoid shape resulted from different etching techniques. (b) Equivalent diameter distribution along depth. (c) Histogram of taper angle θ. (d) Taper angle θ distribution among 196 vias.

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
Volume 27| Part 4| July 2020| Pages 1023-1032
https://doi.org/10.1107/S1600577520005494
Follow J. Synchrotron Rad.
Sign up for e-alerts
E-alerts
Follow J. Synchrotron Rad. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS