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RADIATION
ISSN: 1600-5775

X-ray fluorescence microscopy exposure estimates using a single excitation energy

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aApplied Physics Program, Northwestern University, Evanston, IL 60208, USA, bDepartment of Microbiology, Genetics and Immuology, Michigan State University, East Lansing, MI 48824, USA, cDepartment of Chemistry, Michigan State University, East Lansing, MI 48824, USA, dElemental Health Institute, Michigan State University, East Lansing, MI 48824, USA, eDepartment of Physics and Astronomy, Northwestern University, Evanston, IL 60208, USA, and fChemistry of Life Processes Institute, Northwestern University, Evanston, IL 60208, USA
*Correspondence e-mail: [email protected]

Edited by R. Ingle, University College London, United Kingdom (Received 21 January 2026; accepted 11 May 2026; online 16 June 2026)

Scanning fluorescence X-ray microscopy is widely used for quantitative mapping of elemental concentrations, including in studies of essential but low-concentration metals in cells, tissues, and organs. Practical studies often use a single incident photon energy to excite fluorescence from many elements. We present calculations of the number of incident photons per pixel required to detect a specified areal concentration of an element in the case of far-from-threshold excitation, along with the calculated radiation dose consequently imparted in a simple model tissue. We also show how certain approximations can lead to less accurate estimates. These calculations are not specific to one particular experiment, though we also provide a comparison with one experimental result. These results can be used to guide experimental planning for studies of the role of low-concentration elements in biological tissues.

1. Introduction

X-ray fluorescence (XRF) allows for the identification of specific chemical elements, as was understood more than a century ago (Barkla, 1911View full citation; Moseley, 1913View full citation; Moseley, 1914View full citation). Scanning a small X-ray beam allows for the imaging of elemental content (Horowitz & Howell, 1972View full citation; Sparks, 1980View full citation; Jones et al., 1984View full citation) in an approach which we refer to here as scanning fluorescence X-ray microscopy (SFXM). This approach shows wide utility including in research of the roles of essential but low-concentration metals in biological functions in 2D (Paunesku et al., 2006View full citation; Fahrni, 2007View full citation; Pushie et al., 2014View full citation), and in 3D via X-ray fluorescence tomography (de Jonge & Vogt, 2010View full citation).

In transmission X-ray microscopy using absorption and phase contrast, there is rich literature on calculations of X-ray photon fluence requirements for achieving a specified spatial resolution (Sayre et al., 1977View full citation; Rudolph et al., 1990View full citation; Schneider, 1998View full citation; Howells et al., 2009View full citation; Du & Jacobsen, 2018View full citation), and similar calculations exist for imaging based on coherent scattering (Shen et al., 2004View full citation; Schropp & Schroer, 2010View full citation). (While photometry defines fluence in terms of energy per area, these other studies use photon fluence or photons per area for calculations in which Poisson statistics of photon counts are important.) However, while there have been careful studies of the achieved elemental detection limits in specific synchrotron-based SFXM measurements (De Samber et al., 2016View full citation; Adams et al., 2011View full citation), there are no recent calculations predicting the off-threshold illumination required to achieve a specified level of detection. Several early studies used approximate values for the relevant interaction coefficients to compare X-ray-induced X-ray fluorescence against other elemental detection methods such as electron- or proton-induced X-ray emission, and electron energy-loss spectroscopy (Kirz et al., 1978View full citation; Kirz, 1980aView full citation). This methodology was also used to predict X-ray illumination requirements for SFXM (Kirz, 1980bView full citation). More recent work considered radiation dose limits for imaging hydrated cells (Fayard et al., 2009View full citation). However, these studies assumed illumination at a photon energy just above the relevant absorption edge of each element, which is not the practice of most studies today.

Today, SFXM is often carried out using a single incident photon energy (often 10–12 keV in the case of many biological studies) to excite the emission of X-ray fluorescence from multiple elements simultaneously, even though these elements have absorption edges and emission lines at photon energies well below the illumination photon energy. Photon counting at energies characteristic of the elements of interest, coupled with spectrum analysis, background correction, and mass calibration standardization, leads to quantitative elemental maps of the sample. For biologists interrogating tissue and cell-based samples, the pixel-by pixel quantitative resolution of heterogeneity in these elemental maps provides powerful insights into fundamental biological processes, as well as etiology of disease states (Zee et al., 2022View full citation). To model this common practice and better understand limitations in the quantitative results, one must account for far-from-threshold excitation.

In most SFXM experiments, energy-dispersive spectrometry (EDS) detectors are used in conjunction with analysis programs (Vogt, 2003View full citation; Solé et al., 2007View full citation; Ryan et al., 2010View full citation; Crawford et al., 2019View full citation) that account for the energy resolution of such detectors, and backgrounds including X-ray scattering and incomplete charge collection from the detector (Van Grieken & Markowicz, 2002View full citation). Fluorescence spectrum analysis is simplified if one instead uses wavelength dispersive spectrometry (WDS) detectors (De Pauw et al., 2024View full citation), but WDS is limited in solid angle coverage and wavelength range so that it is usually not employed unless chemical state information is required.

With these developments, we revisit the question of illumination requirements for SFXM imaging of elemental concentrations. We account for illumination photon energies that can be far from thresholds for specific element excitation, and we make use of easy computer access to accurate tabulations of the relevant X-ray interaction coefficients as is described in Section 2[link]. This allows us to predict the incident photon fluence Mathematical equation (given here in photons cm−2; see Table 1[link]) at a single incident photon energy Einc required to detect specific elements at a specific areal mass concentration ρ′. We note that the mass per area ρ′ is distinct from the density ρ of mass per volume; this follows the notation used in Section 9.2 of a recent text (Jacobsen, 2020View full citation) (see Section 3.4[link] of this manuscript for conversions to other metrics). Such calculations are especially interesting when considering a specified minimal value Mathematical equation, which sets the limit of detection (LOD) for an element. We can then use this photon fluence Mathematical equation to calculate the radiation skin dose Dskin necessarily imparted to the incident-beam-facing surface of a specified matrix material (for example, for detection of an element located in a biological cell with some average composition), since dose can set limits on the imaging of radiation-sensitive materials. We show xraylib-based (Schoonjans et al., 2011View full citation) calculations for a wide range of trace elements at different incident energies using an X-ray fluorescence forward model that considers the excitation dependence of mass photoionization cross sections, Coster–Kronig transitions, cascade effects, the presence of an EDS detector entrance window, and the presence of any gas in the sample environment.

Table 1
Energy-dependent parameters used in our calculations, with descriptions, indications of where they first appear, and units provided

Term Energy dependence Description Units
Mathematical equation Mathematical equation Mean number of detected fluorescence photons for a given fluorescence line [equation (1)[link]] photons per pixel
Mathematical equation Mathematical equation Mean number of incident photons illuminating a specimen [equation (1)[link]] photons per pixel
Mathematical equation Mathematical equation(Einc) Mass X-ray fluorescence line production cross section [equation (1)[link]] cm2 g−1
ηij ηij(Eij) X-ray fluorescence line net detection efficiency [equations (1)[link] and (5)[link]] Unitless
Mathematical equation Mathematical equation(Einc) Mass photoionization partial cross section of subshell i [equation (3)[link]] cm2 g−1
Mathematical equation Mathematical equation(Eij) Total mass photoionization cross section of a detector window material [equation (5)[link]] cm2 g−1
μw μw(Eij) Linear absorption coefficient of a detector window material [equation (5)[link]] cm−1
Mathematical equation Mathematical equation(Eij) Total mass photoionization cross section of any gas in the specimen environment [equation (5)[link]] cm2 g−1
μg μg(Eij) Linear absorption coefficient of any gas in the specimen environment [equation (5)[link]] cm−1
Mathematical equation Mathematical equation Total mean number of detected fluorescence photons [equation (6)[link]] photons per pixel
Mathematical equation Mathematical equation Photon fluence incident upon a specimen [equation (10)[link]] photons cm−2
Mathematical equation Mathematical equation Total mass photoionization cross section of a matrix material [equation (12)[link]] cm2 g−1
Mathematical equation Mathematical equation Total mass photoionization cross section of element Z′ in a matrix material [equation (12)[link]] cm2 g−1
Dskin Dskin(Einc) Radiation skin dose imparted to a matrix material's beam-facing surface [equation (14)[link]] Gy

These results can be used for experimental planning. If one knows the absolute incident photon energy Einc, incident flux (in photons s−1), focal spot size, and solid angle of detection of an energy-dispersive detector, one can calculate the per-pixel exposure time required to reach an incident number of photons per pixel Mathematical equation as needed to obtain a certain detectable mass per area ρ′ for a specified element.

2. The X-ray fluorescence forward model

In a typical SFXM experiment, the specimen is meant to be illuminated with Mathematical equation incident photons per pixel at energy Einc (per-pixel statistical fluctuations will be distributed around Mathematical equation). Some fraction of the incident photons are absorbed by a target element of atomic number Z, leading ultimately to a mean number of detected photons of Mathematical equation corresponding to X-ray fluorescence line ij, where i and j are initial and the final electron vacancy states, respectively. (For notational simplicity, we do not explicitly indicate the energy dependence of each variable, but this is shown in Table 1[link]; see also Section S1 in the supporting information for information on relating transitions ij to conventional X-ray nomenclature.) For a specimen sufficiently thin that there is neither scattering of the incident signal nor self-absorption of the fluorescence signal, the mean number Mathematical equation of detected fluorescence photons per pixel can be expressed as (Sherman, 1955View full citation; Schoonjans et al., 2011View full citation; Kirz et al., 1978View full citation; Sparks, 1980View full citation)

Mathematical equation

where Mathematical equation is the mass X-ray fluorescence production cross section (e.g. cm2 g−1) at energy Einc, ρ′ is the local areal mass density (e.g. g cm−2), and ηij is the net detection efficiency for line ij [equation (5)[link]].

In this work, we use mass cross sections Mathematical equation (typically given in cm2 g−1), which are distinct from atomic cross sections σij (typically given in barns per atom, where 1 barn = 10−24 cm2). Mass cross sections are more common to find in fundamental parameter databases (Thompson et al., 2009View full citation), but they are related to atomic cross sections via

Mathematical equation

where σij is the atomic XRF production cross section, NA is Avogadro's number, and Ar is the relative atomic mass (molar mass) of the absorbing element. Mass XRF production cross sections are related to the probability of fluorescence line ij being emitted due to subshell i being excited by an incident X-ray photon; this can be calculated via (Schoonjans et al., 2011View full citation)

Mathematical equation

where Mathematical equation is the mass photoionization partial cross section of subshell i, ωi is the subshell fluorescence yield, and Fij is the fractional yield or branching ratio which is the fraction of ωi emitted fluorescence photons corresponding to the ij line. For Mathematical equation, care is generally taken when determining what values to use. The simplest assumption is that, as one crosses the threshold energy for removing an electron from a specific subshell, the fractional increase in absorption tells one the fractional increase in fluorescence events resulting from that subshell. This gives rise to the jump ratio approximation ri for subshell i (Martin, 1927View full citation; Compton & Allison, 1935View full citation; Sherman, 1955View full citation). This approximation generally holds well for K shell excitations, with the fraction of absorption events that go towards creating K shell vacancies given by

Mathematical equation

where τ′ is the total mass photoionization cross section. For the L shell and beyond, the excitation-dependent nature of photoionization becomes more important at higher Einc relative to the respective subshell absorption edge (Scofield, 1973View full citation; Hönicke et al., 2014View full citation; Hönicke et al., 2016View full citation; Hönicke, 2023View full citation). Therefore, the jump ratio approximation of equation (4)[link] loses accuracy when applied to L shell fluorescence, as illustrated in Section 4[link]. Two additional phenomena (Bambynek et al., 1972View full citation; Schoonjans et al., 2011View full citation) play important roles for those shells:

(i) Coster–Kronig (CK) transitions: special cases of Auger electron emission where electron vacancies are filled by electrons in higher subshells within the same shell, causing electrons to be emitted from either higher shells or from the same shell. In the latter case, the CK transition becomes a super Coster–Kronig (SCK) transition.

(ii) Cascade effects: vacancies created due to general Auger emission, electrons emitted due to (S)CK transitions, and/or XRF events involving lower shells.

Together, these phenomena can affect the values of Mathematical equation, especially as Einc goes well beyond edge energies Mathematical equation [where i′ = 1, 2, 3 (similar considerations apply to M edges and beyond)]; this is illustrated in calculations shown in Section 3.1[link].

Detection efficiencies η for X-ray fluorescence typically consider the solid angle fraction Ω/(4π) that a fluorescence detector subtends. Most hard X-ray fluorescence experiments use EDS detectors, and in most cases the cooled detection elements are protected from contamination by being placed behind thin windows. These windows of thickness tw are often fabricated of beryllium so as to minimize the absorption of fluorescence at energies of a few keV or above. In addition to detector entrance windows, we also account for signal absorption in a gas path (air, helium, etc.) over a distance dg between the sample and detector window. Therefore, we modify the efficiency η to include window and gas attenuation factors, giving ηij for a particular fluorescence line ij of

Mathematical equation

In the above equation, Mathematical equation and Mathematical equation are the total mass photoionization cross sections of the window material and gas, respectively, Eij is the fluorescence energy of line ij of an emitting element, and ρw and ρg are the densities of the window material and gas, respectively. [The second form of equation (5)[link] uses the energy-dependent window and gas material linear absorption coefficients μw = Mathematical equation and μg = Mathematical equation, respectively.] We show in Section S3 of the supporting information how a beryllium window and air can change the minimum number of incident photons Mathematical equation per pixel required to detect a given number of fluorescence photons per pixel at a specified areal mass concentration Mathematical equation. Incomplete charge collection (Van Grieken & Markowicz, 2002View full citation) of electron–hole separation events in the detector can also effectively reduce the number of detected photons; however, to simplify calculations, we ignore this factor.

3. Calculations of minimum photon exposure and radiation dose

We now use equation (1)[link] to solve for the required number of incident photons Mathematical equation per area. We do so based on a requirement to detect Mathematical equation fluorescence photons per pixel in an image.

3.1. Minimum number of incident photons per pixel

To obtain the theoretical minimum number of incident photons per pixel Mathematical equation for detecting Mathematical equation fluorescent photons per pixel, all fluorescence line contributions calculated using equation (1)[link] can be summed up via

Mathematical equation

From basic considerations of false-positive and false-negative error rates in detection (Currie, 1968View full citation), it is often sufficient to detect

Mathematical equation

in order to detect the presence of an element at low concentration when the background is sufficiently low. The choice of Mathematical equation = 5 photons per pixel is somewhat arbitrary, though it is consistent with the Rose criterion (Rose, 1946View full citation) for image recognition in the case of zero background signal. The assumption of near-zero background indeed applies to the case of detecting low-concentration essential metals in biological specimens when using full-spectrum fitting methods to remove background signals; in our case we used the program M-BLANK (Crawford et al., 2019View full citation) to obtain experimental histograms of detected photons with near-zero background signal as shown in Fig. 2 and discussed in Section 3.5[link].

With a specified requirement for Mathematical equation, one can rearrange equation (6)[link] to solve for the required number of incident photons per pixel Mathematical equation. We do so at a specified minimum value of detectable mass density Mathematical equation corresponding to an LOD; this gives

Mathematical equation

This result allows us to predict the number of photons Mathematical equation at photon energy Einc required per pixel when attempting to detect a mass concentration Mathematical equation of any specified element.

3.2. Corresponding radiation dose to a matrix material

In many studies, one is measuring a low mass concentration Mathematical equation of a specified element present in a higher-concentration matrix material; one example involves study of the role of zinc in oocytes and embryos during fertilization (Que et al., 2015View full citation; Kong et al., 2015View full citation; Balough et al., 2025View full citation). High radiation doses can lead to morphological changes and mass loss in the organic materials in cells and tissues (Jacobsen, 2020View full citation), so it is also important to provide an estimate of the radiation dose imparted to a matrix material (which we denote with the subscript `mat') associated with irradiation with Mathematical equation photons per area. To do so, we first consider the incident photon fluence Mathematical equation of

Mathematical equation

where Abeam is the area of the incident beam [which equals π(dbeam/2)2 for a uniform circular beam spot of diameter dbeam]. Inserting the result of equation (8)[link] into this expression yields

Mathematical equation

where Mathematical equation is also known as the minimum detectable mass mmin (Kirz et al., 1978View full citation). Skin dose Dskin is the radiation dose delivered to the beam-facing surface of a matrix material; it can be found from (Kirz et al., 1978View full citation; Jacobsen, 2020View full citation)

Mathematical equation

where (Jacobsen, 2020View full citation)

Mathematical equation

and where the final form of equation (11)[link] comes from equation (9)[link]. In the above two equations, Mathematical equation is the total mass photoionization cross section of the sample matrix, and Mathematical equation is the weighting coefficient accounting for the atom number fraction of each element Z′ present in the matrix material (that is, for each Z′ ∈ mat). If the sample is tilted by angle θ relative to the transverse of the incident beam (so as to balance between XRF self-absorption minimization and beam broadening), then the beam width as seen by the tilted sample pixels along one direction increases by a factor of Mathematical equation. In this case, equation (11)[link] becomes

Mathematical equation

leading to a factor Mathematical equation drop in the skin dose. Substituting equation (10)[link] into the above equation results in

Mathematical equation

as the skin dose.

It is common in X-ray imaging calculations to represent biological specimens as comprising a model protein with the compositional average of all 20 amino acids, with a stoichiometric composition of H48.6C32.9N8.9O8.9S0.6 (London et al., 1989View full citation) (the density does not need to be specified; see Section S2 in the supporting information). We used that protein as the matrix material in the skin dose calculations described in Section 3.3[link].

3.3. Numerical example: low-concentration elements in a protein matrix

In Section 3.1[link], we derived the minimum number Mathematical equation of incident X-ray photons per pixel [equation (8)[link]] required for detection of an elemental concentration Mathematical equation. As noted in Section 3.1[link], those derivations were performed under the assumption that the detection of Mathematical equation = 5 photons per pixel is sufficient for elemental detection (this point is discussed further in Section 3.5[link]). Because this covers most SFXM studies today, our calculations only include X-ray fluorescence from K and L subshells; our approach could be extended to M subshells and beyond if desired. From the calculations of Mathematical equation, we also computed the corresponding matrix material skin dose Dskin [equation (14)[link]] as described in Section 3.2[link]. We used those results to obtain numerical estimates representative of typical experiments while assuming the following:

(i) The specimen matrix is the model protein of stoichiometric composition H48.6C32.9N8.9O8.9S0.6 as discussed in Section 3.2[link].

(ii) The specimen is illuminated with a single incident photon energy Einc.

(iii) The specimen contains trace elements Z ∈ [10, 92], all at an areal mass concentration of Mathematical equation = 0.05 µg cm−2. This value of Mathematical equation is representative of the limit of detection in an SFXM experiment. Conversions to other metrics for elemental sensitivity are given in Section 3.4[link].

(iv) The specimen is housed in a vacuum environment so that dg = 0.

(v) For each element Z, a fluorescence signal with Mathematical equation = 5 photons per pixel must be counted by a windowless detector with an acceptance solid angle of Ω = 1.35 steradians (sr).

These assumptions were sufficient to calculate the required number of incident photons Mathematical equation per pixel. For computing the resulting skin dose Dskin in the matrix material, we used a value of Abeam corresponding to a circular beam focus dbeam = 40 nm in diameter, and we assumed that the specimen was at normal incidence to the beam so that θ = 0.

Our calculations utilized tabulations provided by the xraylib fundamental parameter database (Schoonjans et al., 2011View full citation). That database contains information relevant for K-, L-, and M-shell fluorescence and involves a complete XRF forward model that accounts for the excitation dependence of mass photoionization partial cross sections (PCSs), CK transitions, and cascade effects. The xraylib database does not include some weak fluorescence lines, like Kα3 and Lβ2, that are formally forbidden by selection rules in single electron theory (Dyson, 1973View full citation) (though they can in fact be weakly present). The database also does not include non-radiative transitions such as SCK transitions. These omitted parameters would not lead to noticeable changes in our results if they were somehow to be included.

With the above assumptions and fundamental parameter tabulations in hand, we show in Fig. 1[link] our calculated values of Mathematical equation (a) and Dskin (b) as a function of atomic number Z, as well as a function of individual incident photon energies Einc over the range 4 to 34 keV. The values of Mathematical equation and Dskin are shown using a false color map, with the color map scale shown on the right. One can think of this as a topographical map of terrain, with contour lines at altitude intervals. The contour lines are labeled with numbers C, which correspond to values of 10C for Mathematical equation and Dskin. The calculations utilized K and L fluorescence lines only, so the white region at lower right reflected incident photon energies Einc that were too low to reach the threshold for exciting L line fluorescence. In a similar fashion, the plots showed a `topographical cliff', or sharp decrease, in both Mathematical equation (a) and Dskin (b) when Einc increased to reach the threshold for exciting K fluorescence; this cliff started at (Z = 20, Einc = 4 keV) and rose to (Z = 54, Einc = 34 keV).

[Figure 1]
Figure 1
Combined false color maps and contour plots of the expected minimum number of incident photons Mathematical equation per pixel (a) and skin dose Dskin in Gray imparted (b) for element detection in vacuum. These values are shown versus trace element atomic number Z and individual incident photon energies Einc. These calculations were carried out for a limit of detection of Mathematical equation = 0.05 µg cm−2 and for the detection of Mathematical equation = 5 X-ray photons per pixel summed over all accessible K and L fluorescence emission lines. We assumed that the X-ray fluorescence detector was windowless and had a solid angle of collection of Ω = 1.35 sr. The skin dose Dskin (b) associated with Mathematical equation was calculated assuming a model protein composition of H48.6C32.9N8.9O8.9S0.6 (London et al., 1989View full citation) and a focused beam diameter of dbeam = 40 nm. These calculations included all the effects related to photoionization partial cross sections as described in Section 3.1[link]. As Z increased, the contributions to Mathematical equation and Dskin for a particular subshell abruptly changed when Einc hit and exceeded that subshell's absorption edge (labeled `thresh.'). The white regions in each panel exist due to an individual value of Einc not being high enough to excite the L3 subshell, as well as due to the exclusion of XRF events stemming from shells greater than L3 from our calculations. This calculation employed tabulated data from xraylib (Schoonjans et al., 2011View full citation). Contour values correspond to base-10 exponents.

Limits on radiation dose to the specimen depend very much on specimen preparation conditions. For room-temperature hydrated specimens, radiation doses as low as 105 Gy can lead to mass loss of organic components and shrinkage, even in chemically fixed specimens (Williams et al., 1993View full citation). Frozen hydrated samples imaged at liquid nitrogen temperature are far more robust, with little change seen between successive 20 nm resolution images at radiation doses of about 3 × 107 Gy (Deng et al., 2017View full citation). Even at these doses, the damage is mainly in the form of bond breaking in organic materials, with minimal mass loss (Beetz & Jacobsen, 2003View full citation). For studies of elemental distributions in biological samples, samples that have been rapidly frozen (often via plunge-freezing in liquid ethane or propane) and then freeze-dried show excellent retention of low-concentration metals (Perrin et al., 2015View full citation; Jin et al., 2017View full citation). Samples in such a condition show little mass loss at doses probably up to about 109 Gy, though there is a lack of systematic studies exploring this. Since Fig. 1[link] showed that radiation doses above 108 Gy are rarely required, one can expect that radiation dose will not usually impede X-ray fluorescence microscopy studies of elemental distributions.

While radiation damage depends mainly on total dose rather than dose rate, sample heating depends mainly on both dose rate and heat conduction in the specimen and to the specimen mount. Sample heating has not often been observed in X-ray microscopy of biological specimens, but finite element analysis calculations have suggested that nanofocused hard X-ray beams can lead to localized specimen heating at incident photon fluxes above about 1011 photons s−1 (Wallander & Wallentin, 2017View full citation).

3.4. Other equivalent measures of elemental detection

We have carried out our calculations based on areal mass density ρ′ since that is the quantity that is directly useful for the forward model described in Section 2[link]. However, many users of SFXM prefer to use other metrics for elemental detection. As noted in Section 3.2[link], the minimum detectable mass mmin is

Mathematical equation

If the beam intensity is uniform in a circle of diameter dbeam, we have

Mathematical equation

which gives mmin = 0.628 ag (i.e. 6.28 × 10−19 g) for Mathematical equation = 0.05 µg cm−2 and dbeam = 40 nm. The minimum number of detectable atoms Mathematical equation for a fluorescing element with molar mass Ar is then

Mathematical equation

For Mathematical equation = 0.05 µg cm−2, dbeam = 40 nm, and a molar mass of Ar = 40.08 g mol−1 for Ca, this gives a minimum number of detected atoms of Mathematical equation = 9440 atoms. If this number of atoms is in a matrix material of density ρmat, thickness tmat, and molar mass Ar,mat, the number of matrix atoms Natom,mat is given by

Mathematical equation

where mmat is the absolute mass of the matrix. A matrix of carbon with ρmat = 2.26 g cm−3, Ar,mat = 12.011 g mol−1, and thickness tmat = 10 µm thus has Nmat = 1.4 × 109 atoms in the illuminated region. From equations (17)[link] and (18)[link], one can calculate the atomic parts-per-million sensitivity Mathematical equation as

Mathematical equation

where

Mathematical equation

is the traditional mass parts-per-million sensitivity. For this example here of calcium in a carbon matrix, these two equations yield Mathematical equation = 6.63 p.p.m. and Mathematical equation = 22.1 p.p.m., respectively.

3.5. Experimental validation

The calculations of the minimum number of incident photons per pixel Mathematical equation of equation (8)[link] assumed zero background when detecting Mathematical equation fluorescence photons per pixel. In a typical SFXM experiment, scattering in the forms of elastic (Rayleigh) and inelastic (Compton) scattering can lead to spectral background peaks at and slightly below incident energy Einc, respectively, and incomplete charge collection in energy-dispersive detectors can also appear as a background signal (Van Grieken & Markowicz, 2002View full citation). However, as mentioned in Section 1[link], full-spectrum analysis programs are capable of correcting for these backgrounds (Ryan, 2000View full citation; Vogt, 2003View full citation; Solé et al., 2007View full citation; Crawford et al., 2019View full citation). While there are many reports of minimum detection limits in SFXM (Adams et al., 2011View full citation; De Samber et al., 2016View full citation), they usually are not accompanied by absolute measurements of photon fluence as required to compare experiments with these calculations for number of incident photons Mathematical equation per pixel and a minimum detected areal mass concentration Mathematical equation.

We compare here with one recent experiment (Roter et al., 2026View full citation) of K fluorescence of five low-concentration elements present in an SFXM experiment. This experiment involved a 10 µm-thick section of dehydrated mouse kidney tissue mounted on a Si3N4 window, imaged at beamline 8-BM-B at the Advanced Photon Source at Argonne National Laboratory, USA. In a typical scan with a per-pixel imaging time of tdwell = 50 ms, the sample was illuminated with Mathematical equation = 3.9 × 108 photons per pixel (±5%) at Einc = 10 keV photon energy. The full fluorescence spectrum was obtained using a seven-element energy-dispersive detector with an entrance window of tw = 25 µm-thick beryllium and with a vacuum gap of dv = 0.4 cm between the central detector sensor and the beryllium window. Unfortunately, the sample-to-detector plane distance

Mathematical equation

(where dg is the air gap between the sample and beryllium window) was not directly measured due to the presence of a collimator guarding against stray X-ray scattering; instead, an inverse-square law fit of the signal at three different detector distances (Roter et al., 2026View full citation) was used to obtain an estimate of the sample-to-sensor distance. This gave an estimate of dsdp = 0.98 cm for the center detector sensor element, corresponding to an acceptance solid angle of Ω = 1.35 sr [see Section S3 of the supporting information of Roter et al. (2026View full citation); this estimate is discussed below]. The values of Ω and Einc here correspond to the calculation assumptions described in Section 3.3[link]. The recorded spectrum was analyzed with the M-BLANK software package (Crawford et al., 2019View full citation) using spectral data obtained from a sample-free Si3N4 window for background subtraction, as well as elemental areal mass concentrations obtained by comparison with fluorescence signals obtained from an AXO 10X thin film standard (RF8-200-S2454, Applied X-ray Optics, GmbH). In that experiment, P, S, Ca, Fe, and Ni were all present in a wide range of concentrations. The forward model of equation (1)[link] assumed no background other than from Poisson fluctuations stemming from the detection of fluorescence photons themselves; this well approximated the case of the selected elements since their true XRF signals were either originally much stronger than that of the experimental background or enough of the background was subtracted out when initially fitting raw fluorescence spectra.

For the five selected elements, we defined the limit of detection Mathematical equation via background-corrected fits to the fluorescence of the Si3N4 window. After measuring the fluorescence emitted from an empty Si3N4 window, we averaged the resulting spectrum over all pixels to acquire a representative background spectrum. This average background was then subtracted at every pixel of the kidney section scan, and we fit the acquired difference spectra using the same M-BLANK parameterized peak model employed for the sample data (Crawford, 2020View full citation). This yielded a population of fitted, background-corrected signals (expressed as calibrated areal mass concentrations ρ′) across all substrate pixels for each element. We took the standard deviations Mathematical equation of those distributions as the noise levels, and defined the LOD to be Mathematical equation = Mathematical equation. This approach provided an element-specific, data-driven estimate of Mathematical equation under the same experimental conditions and fitting model as the sample measurements.

To obtain measures of the total number of fluorescence photons Nfluor collected at each pixel within 1% of the per-element Mathematical equation determined above, we defined energy windows for summing Kα and Kβ photons using xraylib tabulated line energies Eij (Schoonjans et al., 2011View full citation) combined with an empirically calibrated detector response function. We specified the nominal photon energies of the Kα1, Kα2, Kβ1, and (where relevant) Kβ2 lines and treated those values as line centroids. Afterward, for each detector element, we parameterized the line energy resolution ΔEij as an energy-dependent full width at half-maximum (FWHM) via a standard Fano-limited model of (Schlosser et al., 2010View full citation)

Mathematical equation

In the above equation, s0 and s1 are detector element-specific parameters obtained by fitting the measured detector element response to multiple fluorescence lines in the same dataset. We then defined the integration window bounds Mathematical equation for each fluorescence line ij according to

Mathematical equation

Because all values of s0 and s1 were extracted directly from Si3N4 scans rather than from a fixed lookup table, the resulting energy windows accurately reflected the actual detector performance under the specific beamline and low-count-rate conditions used in the experiment. For calcium, where the Kα peaks have some overlap with potassium Kβ lines when the peak broadening of the energy-dispersive detector is taken into account, we mitigated interference by excluding pixels in which the fitted potassium concentration map exceeded its own value of Mathematical equation scaled up by the expected XRF intensity ratio FKα/FKβ = 8.65 (Schoonjans et al., 2011View full citation). This ensured that the calcium photon statistics near the calcium limit of detection were not dominated by potassium Kβ spill-over (Crawford et al., 2018View full citation).

After calculating all energy windows, we summed up the total number of photons collected over all detector elements for each pixel within those windows to obtain an aggregate number Nfluor of XRF photons collected over all detector elements for each pixel around Mathematical equation. Ultimately, all of this resulted in a distribution of collected fluorescence photons Nfluor across all selected pixels, shown as histograms in Fig. 2[link]. From these histograms of probability densities for each element, we obtained the mean number of XRF photons Mathematical equation collected per pixel. In some cases, these mean values were slightly less than the somewhat arbitrary assumption of Mathematical equation = 5 used as the basis for our calculations, highlighting the very low background that remains after using full-spectrum X-ray fluorescence analysis programs (Vogt, 2003View full citation; Solé et al., 2007View full citation; Ryan et al., 2010View full citation; Crawford et al., 2019View full citation).

[Figure 2]
Figure 2
The distribution of total X-ray fluorescence photons detected in each pixel around different elemental LODs Mathematical equation in our experiment at beamline 8-BM-B (Roter et al., 2026View full citation). Shown here are histograms of probability densities for several elements with respect to the total number Nfluor of XRF photons detected for sample pixels within 1% of each element's LOD, which we obtained by summing up the contributions from all detector elements. From those distributions, we were able to calculate the mean minimum number of X-ray fluorescence photons Mathematical equation detected per pixel.

In Table 2[link], we show for the five selected elements both the limits of detection Mathematical equation and the mean number of detected X-ray fluorescence photons Mathematical equation obtained from experimental data using the procedures described above. The table also shows corresponding values of Mathematical equation as calculated from equation (8)[link] for those sample elements with two different distances dg in air. We compared these results via the ratio Mathematical equation while using the previously reported value of Mathematical equation = 3.9 × 108 photons per pixel (Roter et al., 2026View full citation).

Table 2
Comparison of results from one particular experiment (Roter et al., 2026View full citation) (with Mathematical equation from Section 3.5[link]) against calculated values for mass concentrations Mathematical equation and detected number of fluorescent photons Mathematical equation per pixel, along with the number of incident photons Mathematical equation per pixel. As noted in Section 3.5[link], we did not have a direct measure of the air gap distance dg of equation (21)[link]; therefore, we show the ratio of experimental to theoretical incident photons Mathematical equation for the sample dsdp = 0.98 cm from the detector plane, as well as for a revised value of dsdp = 4.5 cm (see Section S4 of the supporting information)

Element Mathematical equation (µg cm−2) Mathematical equation (photons per pixel) Mathematical equation [equation (8)[link]] (photons per pixel) (dsdp = 0.98 cm)(dg = 0.58 cm) Mathematical equation (dsdp = 0.98 cm) (dg = 0.58 cm) Mathematical equation (dsdp = 4.5 cm) (dg = 4.1 cm)
P 9.893 3.64 2.9 × 106 132.5 1.44
S 1.853 5.08 1.1 × 107 35.0 0.79
Ca 0.073 3.54 3.5 × 107 10.9 0.70
Fe 0.025 4.11 2.9 × 107 13.2 1.18
Ni 0.010 2.83 3.4 × 107 11.5 1.05

As noted earlier, we were unable to directly measure the sample-to-detector plane distance dsdp of equation (21)[link] for the central detector sensor element; therefore, we fit the signal to an inverse-square law at three different detector displacements Δd and estimated that value to be dsdp = 0.98 cm [see Section S3 of the supporting information of Roter et al. (2026View full citation)]. If the distance dsdp were in fact to be a larger value, this would both increase the air gap distance dg of equation (21)[link] and decrease the detector's solid angle of collection from the assumed value of Ω = 1.35 sr. Unlike the case of our theoretical calculations, which assumed a vacuum environment between the sample and detector (Section 3.3[link]), the experimental result (Roter et al., 2026View full citation) used an air environment, so one has greater absorption of fluorescence emission over the air gap distance dg at lower photon energies relative to higher photon energies. It is possible that our three-distance inverse-square law fit for estimating dsdp = 0.98 cm was erroneous. If instead we assume dsdp = 4.5 cm, then the detector solid angle would drop to Ω = 0.13 sr, and the ratio Mathematical equation would be much closer to 1 for all detected fluorescence signals as discussed in Section S4 of the supporting information.

4. Effects of subshell excitation models

The calculation results shown in Table 2[link] incorporated the excitation dependence of subshell mass photoionization cross sections Mathematical equation, the existence of CK transitions, and the existence of both radiative and nonradiative cascade effects (see Sections 1[link] and 2[link]). We now consider the changes that would arise with less-exact calculations. For these illustrations, we used a single incident photon energy of Einc = 10 keV, and we assumed that Mathematical equation = 5 fluorescent photons per pixel were required to detect an areal concentration of Mathematical equation = 0.05 µg cm−2 when using a windowless EDS detector.

To illustrate the shortcomings of using the simpler `jump ratio' model of equation (4)[link], we show in Fig. 3[link] differences in requirements for the minimum number of excitation photons Mathematical equation with and without this simpler model. As can be seen, the `jump ratio' approximation leads to only small differences in Mathematical equation when detecting K fluorescence lines, but it leads to erroneously high estimates of Mathematical equation for the L shell. This was especially true when relying on the L1 line emission for elemental detection, as CK transitions cannot occur in that subshell. For that case, the error increased with greater differences between the incident photon energy Einc and the absorption edge energy EL1 of a particular element. Differences like these have been experimentally observed (Hönicke et al., 2014View full citation; Hönicke, 2023View full citation). In one example, inaccurate quantification of the thickness of a palladium (Pd) thin film was observed as the incident photon energy Einc was increased well beyond the energy of each of the three L absorption edges; this demonstrated the inaccuracy of the jump ratio approach, in particular when using L1 fluorescence emission lines (Hönicke et al., 2016View full citation).

[Figure 3]
Figure 3
Subshell-specific calculations of the minimum number of incident photons Mathematical equation per pixel for a fixed incident photon energy of Einc = 10 keV, with and without the `jump ratio' approximation. The (E-D PCS + CK) calculations were carried out using excitation-dependent mass photoionization partial cross sections, while the less-accurate (JR + CK) calculations were carried out using the `jump ratio' approximation of equation (4)[link]. In both cases, Coster–Kronig transitions were included (CK). As can be seen, the `jump ratio' approximation leads to inaccurately high calculated values of Mathematical equation, in particular when considering fluorescence from L1 lines when the excitation energy Einc is well above the edge energy EL1. We assumed a windowless EDS detector and a vacuum environment for these calculations so as to not affect Mathematical equation at lower L fluorescence emission energies. Tabulated data from xraylib (Schoonjans et al., 2011View full citation).

The exclusion of cascade effects can also lead to erroneous estimates of the required number of incident photons Mathematical equation when considering L fluorescence emission lines, as shown in Fig. 4[link]. For that comparison, Mathematical equation was lower for all values up until Z = 30, at which point Einc = 10 keV is too low to excite the K edges of higher-Z elements. Because SCK transitions in the L shell were omitted, all values of Mathematical equation above Z = 30 were the same as their non-cascading counterparts. (Again, those values would not change significantly if they were included somehow.)

[Figure 4]
Figure 4
Subshell-specific calculations of the minimum number of incident photons Mathematical equation per pixel for a fixed incident photon energy of Einc = 10 keV with and without the incorporation of cascade effects. Cascading due to K shell photoionization ceased when the K edge energy (labeled `K cutoff') exceeded Einc, which occurs for Z ≥ 31 when Einc = 10 keV. Double vacancies caused by electrons emitted during L-shell super Coster–Kronig transitions were omitted; thus, there were no cascade effects at all past the `K cutoff' shown. Shown here are the results when cascade effects (both radiative and nonradiative) are both considered (E-D PCS + CK + C) and ignored (E-D PCS + CK). In both cases, we used energy-dependent partial cross sections (E-D PCS) and included Coster-Kronig transitions (CK). We assumed a windowless EDS detector and a vacuum environment for these calculations so as to not affect Mathematical equation at lower L fluorescence emission energies. Tabulated data from xraylib (Schoonjans et al., 2011View full citation).

In Figs. 3[link] and 4[link], we observed differences in the estimates of Mathematical equation based only on considering L subshells. However, those differences effectively disappeared when considering the sum of all K and L shell fluorescence contributions.

5. Discussion

In our calculation results shown in Fig. 1[link] for detecting Mathematical equation = 5 XRF photons per pixel at an LOD of Mathematical equation = 0.05 µg cm−2, the minimum number of incident photons Mathematical equation per pixel decreased with increasing atomic number Z for a given incident energy Einc, matching the expected trend: as Einc reaches and exceeds an element's absorption edge, the total mass photoionization cross section τ′ for that element increases, making photoionization (and therefore X-ray fluorescence) more probable. Correspondingly, the empirical XRF histograms of Fig. 2[link] showed that detecting roughly three to six fluorescence photons per pixel was consistently sufficient to reach the operational limits of detection across all elements examined. Therefore, our assumption of Mathematical equation = 5 photons per pixel [equation (7)[link]] was reasonable.

Comparison with experiment showed that our calculations are not disconnected from reality. While there are examples of experimental determination of achieved elemental sensitivity (Adams et al., 2011View full citation; De Samber et al., 2016View full citation), these examples do not provide sufficient information on absolute incident photon flux for a comparison like that shown in Table 2[link]. The experimental results (Roter et al., 2026View full citation) used for the comparison in Table 2[link] were also not perfect from the point of view of determining absolute incident flux, in that a photodiode measurement of incident flux was carried out as a separate measurement rather than during actual fluorescence sample scanning. In addition, we did not directly measure the distance between sample and detector entrance window dg as discussed in Section 3.5[link]; if we assume a revised value of dsdp = 4.5 cm (leading to dg = 4.1 cm) as discussed in Section S4 of the supporting information, Table 2[link] gives good agreement between experiment and calculations. This potential discrepancy, and its possible resolution, highlights the value of careful measurements of absolute incident flux, sample-to-detector distance, and fluorescence detector solid angle of signal collection in future work.

The calculated results of Mathematical equation of equation (6)[link] and Dskin of equation (13)[link] are easy to adjust for parameter choices other than those used in Section 3.3[link] since both Mathematical equation and Dskin have a linear dependence on most of the input parameters. Thus, one can easily adjust the numerical values shown in Fig. 1[link] in a linear way to account for different values of the required number of detected fluorescent photons Mathematical equation per pixel, the detector's solid angle acceptance Ω, and the elemental limit of areal mass detection Mathematical equation. The material and thickness of any detector window or gas path in the experiment between specimen and detector appear in a nonlinear fashion in equations (6)[link] and (13)[link].

6. Conclusion

We have presented here an approach to estimate the minimum number of incident photons Mathematical equation per pixel required for the detection of low-concentration elements when using a single incident photon energy Einc to excite X-ray fluorescence from many different elements Z, which is representative of most experiments in SFXM. Earlier calculations (Kirz, 1980bView full citation) assumed the use of an incident photon energy just above an element's absorption edge, ideal for detecting just one element. In addition, we made use of xraylib (Schoonjans et al., 2011View full citation), which provides computer-accessible tabulations of all relevant parameters and thus allows for more complete calculations. As a result, our model accounted for the incident energy dependence of mass photoionization partial cross sections, CK transitions, cascade effects, and attenuation due to detector windows and gas within a sample environment. As technology upgrades at synchrotrons lead to higher photon brightness, estimates of the limits of detection play an increasingly important role in the planning of SFXM experiments, laying the groundwork for next-generation discoveries in many areas including inorganic physiology.

7. Related literature

The following references, not cited in the main body of the paper, have been cited in the supporting information: Deslattes (1969View full citation); Henke et al. (1993View full citation); Jenkins et al. (1991View full citation); McCullough (1975View full citation); Siegbahn (1925View full citation).

Supporting information


Acknowledgements

We thank Philipp Hönicke for discussions that led us to appreciate the factors that come into play when using excitation energies Einc that are well above the absorption edges of particular elements, especially when L fluorescence lines are considered.

Conflict of interest

The authors declare no conflicts of interest.

Data availability

Experimental data used in this manuscript can be found in our previous work (Roter et al., 2026View full citation). The code we developed for our calculations can be found on Github: https://github.com/bwr0835/xray_fluor_contrast.

Funding information

This material is based upon work supported by the Air Force Office of Scientific Research under award number FA9550-23-1-0284. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the United States Air Force. We also thank the National Institute of General Medical Services of the National Institutes for Health for support under grant P41GM135018.

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